红外技术
紅外技術
홍외기술
Infrared Technology
2015年
10期
873-876,882
,共5页
孔龄婕%杨玉华%张鹏%贺婷%丑修建
孔齡婕%楊玉華%張鵬%賀婷%醜脩建
공령첩%양옥화%장붕%하정%축수건
MEMS 红外光源%热稳定性%动态电阻%薄膜形貌
MEMS 紅外光源%熱穩定性%動態電阻%薄膜形貌
MEMS 홍외광원%열은정성%동태전조%박막형모
MEMS infrared source%thermal stability%dynamic resistance%film morphology
光电标识是完成识别和搜救任务的“眼睛”。作为“眼睛”核心组成器件,MEMS 红外光源的工作稳定性对标识效果具有最直接的影响,而 MEMS 红外光源的工作稳定性取决于辐射薄膜的热稳定性,表现为辐射体薄膜结构工作电阻的动态变化趋势。为此通过开展 MEMS 红外光源电阻特性研究对于深入探索光电标识装置的标识特性意义重大。采用阻抗分析仪进行测试,结果表明 MEMS 红外光源长时间工作下其本征电阻值变化量仅为0.4%,热稳定性良好;在可承受驱动电压范围内,光源的动态电阻随电压的变化无明显偏移,薄膜表面形貌变化正常,MEMS 红外光源整体结构工作稳定。
光電標識是完成識彆和搜救任務的“眼睛”。作為“眼睛”覈心組成器件,MEMS 紅外光源的工作穩定性對標識效果具有最直接的影響,而 MEMS 紅外光源的工作穩定性取決于輻射薄膜的熱穩定性,錶現為輻射體薄膜結構工作電阻的動態變化趨勢。為此通過開展 MEMS 紅外光源電阻特性研究對于深入探索光電標識裝置的標識特性意義重大。採用阻抗分析儀進行測試,結果錶明 MEMS 紅外光源長時間工作下其本徵電阻值變化量僅為0.4%,熱穩定性良好;在可承受驅動電壓範圍內,光源的動態電阻隨電壓的變化無明顯偏移,薄膜錶麵形貌變化正常,MEMS 紅外光源整體結構工作穩定。
광전표식시완성식별화수구임무적“안정”。작위“안정”핵심조성기건,MEMS 홍외광원적공작은정성대표식효과구유최직접적영향,이 MEMS 홍외광원적공작은정성취결우복사박막적열은정성,표현위복사체박막결구공작전조적동태변화추세。위차통과개전 MEMS 홍외광원전조특성연구대우심입탐색광전표식장치적표식특성의의중대。채용조항분석의진행측시,결과표명 MEMS 홍외광원장시간공작하기본정전조치변화량부위0.4%,열은정성량호;재가승수구동전압범위내,광원적동태전조수전압적변화무명현편이,박막표면형모변화정상,MEMS 홍외광원정체결구공작은정。
Photoelectric identification is the eye of the recognition and search and rescue mission. As the core of the eye, the working stability of MEMS infrared light source has the most direct effects on identification effect, and the working stability of MEMS infrared light source depends on the thermal stability of the film,that is, the dynamic variation of the film working resistance. Therefore research on MEMS infrared light source resistance characteristics to explore the photoelectric device identification features is of great significance. Test results of using impedance analyzer show that the MEMS infrared light intrinsic resistance variation is only 0.4% under long hours work, which means good thermal stability. In the sustainable driving voltage range, the dynamic resistance of the source has no obvious change with the voltage offset. The morphology change of thin film surface is normal, and the integral structure of the MEMS infrared source is stable.