CAJ | 학술논문

将水热合成的LiFe1-0．01xNi0．01xPO4(x=0．5,1．0)粉体作为敏感试剂,用旋转-甩涂法涂于锡掺杂玻璃光波导表面,在不同温度下进行热处理。采用紫外-可见分光光度计,测厚仪和平面玻璃光波导气敏测试系统(自组装)研究了薄膜干燥温度对LiFe1-0．01x Ni0．01x PO4薄膜光学及气敏特性的影响。研究结果表明,450℃下干燥的薄膜具有良好的光学透明性并对应的敏感元件显出良好的气敏特性。相同浓度的不同挥发性有机气体中, LiFe0．99 Ni0．01 PO4传感元件对二甲苯气体有较大的响应,其检测响应范围为1×10-7~1×10-3( V/V0),响应-恢复时间分别小于5s和70s。
장수열합성적LiFe1-0．01xNi0．01xPO4(x=0．5,1．0)분체작위민감시제,용선전-솔도법도우석참잡파리광파도표면,재불동온도하진행열처리。채용자외-가견분광광도계,측후의화평면파리광파도기민측시계통(자조장)연구료박막간조온도대LiFe1-0．01x Ni0．01x PO4박막광학급기민특성적영향。연구결과표명,450℃하간조적박막구유량호적광학투명성병대응적민감원건현출량호적기민특성。상동농도적불동휘발성유궤기체중, LiFe0．99 Ni0．01 PO4전감원건대이갑분기체유교대적향응,기검측향응범위위1×10-7~1×10-3( V/V0),향응-회복시간분별소우5s화70s。
The LiFe1-0.01xNi0.01xPO4(x=0. 5,1. 0)powder that synthesized by hydrothermal method, was selected as sensing materi-als,and was subsequently utilized in a spin-coating procedure for the fabrication of LiFe1-0. 01x Ni0. 01x PO4 thin films,and then the coa-ted film was dried at different temperature. The effect of heat treatment on LiFe1-0. 01x Ni0. 01x PO4 thin film’ s optical and gas sensing properties were studied using ultraviolet spectro-photometer,ellipsometer and self assembled optical waveguide gases testing appara-tus. The experimental results indicates that,the thin film which dried at 450℃ was exhibited good optical transparent and excellent sensing capabilities. The sensor has higher response to the xylene gas than the other various volatile organic compounds at same con-centration. LiFe0. 99 Ni0. 01 PO4 OWG sensor exhibits good response to xylene gas in the range of 1 × 10-7 to 1 × 10-3 ( V/V0 ) with re-sponse and recovery times less than 5s and 70s.