CAJ | 학술논문

通过直流对靶反应溅射和射频反应溅射工艺制备了系列磁性金属 Co掺杂 TiO2薄膜样品。通过原子力显微镜和磁力显微镜研究掺杂样品的结构，利用振动样品磁强计研究系列样品的磁性能，对比不同反应溅射方法制备薄膜的性质和结构。经研究发现，射频溅射法制备的样品表面致密程度优于直流溅射法，薄膜表面十分光滑，结构致密，饱和磁化强度略强，薄膜磁性的方向各向异性明显。
통과직류대파반응천사화사빈반응천사공예제비료계렬자성금속 Co참잡 TiO2박막양품。통과원자력현미경화자력현미경연구참잡양품적결구，이용진동양품자강계연구계렬양품적자성능，대비불동반응천사방법제비박막적성질화결구。경연구발현，사빈천사법제비적양품표면치밀정도우우직류천사법，박막표면십분광활，결구치밀，포화자화강도략강，박막자성적방향각향이성명현。
CoTiO2 films were prepared by DC facing-target magnetron reactive sputtering and RF reac-tive sputtering method onto glass substrates at room temperature.The influence of the different method on microstructure and magnetic properties of films was investigated in detail.The micro-structure and magnetic properties were studied systemically with scanning probe microscope (SPM)and vibrating sample magnetometer(VSM).The results indicate that the films by RF sput-tering method showed a homogeneous structure and ferromagnetic properties than the films by DC facing-target magnetron reactive sputtering.