CAJ | 학술논문

文中对超精密微动台变磁阻电机的磁场和推力进行了准确的建模,用于电机的实时控制.分别建立了永磁体和线圈产生的两种磁场单独作用并考虑漏磁的等效磁路模型,同时在动铁心处于不同位置时,通过三维有限元仿真得到每个气隙的漏磁系数来准确的反映漏磁在不同气隙处的三维分布.首先仿真得到动铁心位于 x 正向特定位置时的漏磁系数,对漏磁系数进行拟合,从而在动铁心位于x正向任意位置时对电机磁场进行建模.然后根据动铁心位于x正向和负向时具有的对称性,得到电机在全行程的磁场模型.最后根据电机的磁场模型和麦克斯韦力公式得到全行程的推力模型.推力模型和有限元仿真结果误差小于 6.4%,并通过实验进行了验证.
문중대초정밀미동태변자조전궤적자장화추력진행료준학적건모,용우전궤적실시공제.분별건립료영자체화선권산생적량충자장단독작용병고필루자적등효자로모형,동시재동철심처우불동위치시,통과삼유유한원방진득도매개기극적루자계수래준학적반영루자재불동기극처적삼유분포.수선방진득도동철심위우 x 정향특정위치시적루자계수,대루자계수진행의합,종이재동철심위우x정향임의위치시대전궤자장진행건모.연후근거동철심위우x정향화부향시구유적대칭성,득도전궤재전행정적자장모형.최후근거전궤적자장모형화맥극사위력공식득도전행정적추력모형.추력모형화유한원방진결과오차소우 6.4%,병통과실험진행료험증.
This paper presented the models of the magnetic field and thrust of the variable reluctance actuator (VRA) in ultra-precision microstage for real-time control of the VRA. Magnetic circuit models of the magnetic field produced by the permanent magnet and the magnetic field produced by the coils were respectively built. Leakage magnetic fields were taken into consideration when the magnetic circuit models were built. Simultaneously, when the movers were at different positions, three-dimensional leakage coefficients obtained from finite element method (FEM) simulations showed the values and distributions of the leakage magnetic fields in every gap. Firstly, the model of the magnetic field of the VRA was derived when the mover was at several positions of the positive part of the x axis. Then, utilizing fitting, the model of the magnetic field at every position of the positive part of the x axis was derived. Utilizing symmetry, the models of the magnetic field on the whole stroke was derived. Finally, according to the model of the magnetic field and Maxwell formula, the model of the thrust of the VRA on the whole stroke was derived. The error between the model and the FEM simulations result is less than 6.4%, and the models are proved by an experiment.