CAJ | 학술논문

为获取紫外-真空紫外光学元件的光谱反射率 ,构建了一套反射率测试系统.该反射率测试系统主要由Seya-Namioka紫外-真空紫外单色仪、样品精密转台为主体的光机结构和电子学系统组成.首先,介绍了系统测量原理 ,采用双光路补偿法消除了光源随时间的飘移 ,通过改变系统光路进行两次测量来获取反射光与入射光数据,进而得到光谱反射率.接着对电子学硬件系统进行描述 ,给出了驱动控制单元与信号处理采集单元的硬件设计与组成.因紫外-真空紫外光谱信号微弱 ,采用了锁相放大的方法提高了测量精度.该反射率测试系统测试结果表明波长重复性0.05nm,反射率测量重复精度为1.8% ,系统功能完备稳定性好 ,能够实现对光学元件的高精度测量.
위획취자외-진공자외광학원건적광보반사솔 ,구건료일투반사솔측시계통.해반사솔측시계통주요유Seya-Namioka자외-진공자외단색의、양품정밀전태위주체적광궤결구화전자학계통조성.수선,개소료계통측량원리 ,채용쌍광로보상법소제료광원수시간적표이 ,통과개변계통광로진행량차측량래획취반사광여입사광수거,진이득도광보반사솔.접착대전자학경건계통진행묘술 ,급출료구동공제단원여신호처리채집단원적경건설계여조성.인자외-진공자외광보신호미약 ,채용료쇄상방대적방법제고료측량정도.해반사솔측시계통측시결과표명파장중복성0.05nm,반사솔측량중복정도위1.8% ,계통공능완비은정성호 ,능구실현대광학원건적고정도측량.
In order to obtain the spectral reflectance of ultraviolet and vacuum ultraviolet optical components ,a set of re-flectance measurement system is constructed .The reflectivity measurement system is composed of Seya-Namioka ultravi-olet and vacuum ultraviolet monochromator ,a sample turntable as the main body of the optic and electronic system . First ,the system principle of measurement is introduced ,the elimination of the light source with the time drift is by double light path compensation method ,to obtain the reflected light and incident light data by changing the system opti-cal path of two measurements ,and then obtain the spectral reflectance .Then carries on the description to the electronics hardw are system ,gives the hardw are design and the composition of the driver control unit and the acquisition signal pro-cessing unit .Because ultraviolet and vacuum ultraviolet spectral signal is w eak ,lock in amplifier is applied in the elec-tronics system to improve the measurement accuracy .T he test results show that the reflectivity measurement system re-peatability of wavelength is 0 .05 nm ,measurement repeatability is 1 .8% .The system stability is good ,can realize high precision measurement of optical elements.