CAJ | 학술논문

针对环面蜗杆检测仪系统控制及定位精度的需要，采用 Cortex-M4作为主控制器，控制步进电机驱动载物台运动，步进电机采用闭环控制。光栅尺实时检测 XYZ 导轨的位置信息，并把光栅信号作为反馈信号，构成闭环运动控制系统，实现坐标系中 XYZ 轴的运动和时栅转台旋转的高精度定位。步进电机的驱动采用软硬件细分方法，克服了步进电机爬行和丢步现象。实验表明：该系统采用全闭环控制、步进电机软硬件细分方法，实现了三坐标轴±2μm 的精密定位，保证了环面蜗杆检测仪的准确测量。
침대배면와간검측의계통공제급정위정도적수요，채용 Cortex-M4작위주공제기，공제보진전궤구동재물태운동，보진전궤채용폐배공제。광책척실시검측 XYZ 도궤적위치신식，병파광책신호작위반궤신호，구성폐배운동공제계통，실현좌표계중 XYZ 축적운동화시책전태선전적고정도정위。보진전궤적구동채용연경건세분방법，극복료보진전궤파행화주보현상。실험표명：해계통채용전폐배공제、보진전궤연경건세분방법，실현료삼좌표축±2μm 적정밀정위，보증료배면와간검측의적준학측량。
In view of the torus worm tester system control and positioning accuracy,the Cortex -M4 as the main controller,the control stepper motor to drive the objective table movement,stepper motor adopts closed loop con-trol.the grating ruler for real-time detection of XYZ guide information,the grating signal as the feedback signal, constitute a closed-loop motion control system,realize coordinate system XYZ axis movement and high precision positioning of the turntable rotation.Stepper motor driver uses hardware and software subdivision method,over-come the stepper motor step crawl and lost phenomenon.Experiments show that the system adopts the closed loop control,step motor subdivision method of software and hardware,and realizes the three axes of ±2 μm precision positioning,to ensure the torus worm tester accurate measurement.