噪声与振动控制
譟聲與振動控製
조성여진동공제
Noise and Vibration Control
2015年
5期
39-42
,共4页
振动与波%微机械谐振器%锚点耗散%完美匹配层%结构优化
振動與波%微機械諧振器%錨點耗散%完美匹配層%結構優化
진동여파%미궤계해진기%묘점모산%완미필배층%결구우화
vibration and wave%micromechanical resonator%anchor loss%perfectly matched layers%structure optimization
微机械谐振器在振动过程中总会产生能量耗散，并且具有诸如空气阻尼耗散、热弹性阻尼耗散、锚点结构耗散、表面耗散等诸多耗散机制，其中锚点结构耗散是一种主要的能量耗散机制。应用完美匹配层方法，将无限大区域入射波的吸收问题转化到有限区域内进行。针对中心支撑圆盘体模态谐振器，设计两种不同的锚点支撑结构，并分别讨论其几何结构的变化对谐振器固有频率和锚点损耗品质因子的影响。结果证明通过调整锚点结构，可以大幅度提高谐振器的锚点耗散品质因子，提高能量的利用效率。
微機械諧振器在振動過程中總會產生能量耗散，併且具有諸如空氣阻尼耗散、熱彈性阻尼耗散、錨點結構耗散、錶麵耗散等諸多耗散機製，其中錨點結構耗散是一種主要的能量耗散機製。應用完美匹配層方法，將無限大區域入射波的吸收問題轉化到有限區域內進行。針對中心支撐圓盤體模態諧振器，設計兩種不同的錨點支撐結構，併分彆討論其幾何結構的變化對諧振器固有頻率和錨點損耗品質因子的影響。結果證明通過調整錨點結構，可以大幅度提高諧振器的錨點耗散品質因子，提高能量的利用效率。
미궤계해진기재진동과정중총회산생능량모산，병차구유제여공기조니모산、열탄성조니모산、묘점결구모산、표면모산등제다모산궤제，기중묘점결구모산시일충주요적능량모산궤제。응용완미필배층방법，장무한대구역입사파적흡수문제전화도유한구역내진행。침대중심지탱원반체모태해진기，설계량충불동적묘점지탱결구，병분별토론기궤하결구적변화대해진기고유빈솔화묘점손모품질인자적영향。결과증명통과조정묘점결구，가이대폭도제고해진기적묘점모산품질인자，제고능량적이용효솔。
Energy dissipation of micromechanical resonators is always inevitable in vibration process. There are several energy dissipation mechanisms, such as air damping dissipation, thermo-elastic damping dissipation, anchor loss, surface dissipation and so on. Of them, anchor loss is the main energy dissipation mechanism. In this paper, the perfectly matched layers method was adopted to transform the incident wave absorption problem in infinite domain into that in finite domain. Two different anchor structures of centrally-supported bulk-mode disk resonator were designed. And the influence of the geometrical changes of the structure on the inherent frequencies and anchor loss quality factor of the bulk mode disk resonator was discussed. The results show that the anchor loss quality factor can be greatly improved and the energy utilization efficiency can be raised by changing the anchor structure of the resonator.
