CAJ | 학술논문

采用非平衡磁控溅射法在Si （100）片和M2工具钢上制备Ti?DLC薄膜。通过X射线光电子能谱仪、拉曼光谱仪和扫描电子显微镜分析薄膜的结构以及微观形貌；利用球－盘摩擦磨损试验机研究不同载荷下Ti?DLC／Si3 N4对摩副在水中的摩擦学特性。结果表明， Ti?DLC薄膜具有致密的表面结构，含有较多的C?Csp2键；摩擦介质为去离子水时，薄膜的摩擦因数随着载荷的增加先减小后增大，且载荷增加到一定值后，摩擦因数几乎不再变化；薄膜磨损率随着载荷的增加先升高后降低，而相应的Si3 N4小球磨损率却是先减小后增大，这主要是由于Si3 N4在水中易于发生水合反应，促使摩擦接触表面变得非常平滑，从起到降低摩擦因数，在一定程度上减少磨损的作用。
채용비평형자공천사법재Si （100）편화M2공구강상제비Ti?DLC박막。통과X사선광전자능보의、랍만광보의화소묘전자현미경분석박막적결구이급미관형모；이용구－반마찰마손시험궤연구불동재하하Ti?DLC／Si3 N4대마부재수중적마찰학특성。결과표명， Ti?DLC박막구유치밀적표면결구，함유교다적C?Csp2건；마찰개질위거리자수시，박막적마찰인수수착재하적증가선감소후증대，차재하증가도일정치후，마찰인수궤호불재변화；박막마손솔수착재하적증가선승고후강저，이상응적Si3 N4소구마손솔각시선감소후증대，저주요시유우Si3 N4재수중역우발생수합반응，촉사마찰접촉표면변득비상평활，종기도강저마찰인수，재일정정도상감소마손적작용。
Ti?DLC coatings were deposited on Si (100) wafer and M2 tool steel using unbalanced magnetron sputtering. The microstructure and morphologies of Ti?DLC coatings were analyzed and observed using X?ray photoelectron spectrosco?py,Raman spectroscopy and scanning electron microscope (SEM).The friction properties of Ti?DLC/Si3N4 tribopairs in water at different loads were investigated using ball?on?disk tribometer. The results show that Ti?DLC coatings have dense surface structure and many C?Csp2 bonds.The friction coefficient is first decreased,and then increased with the increasing of normal load.When the normal load reaches to a certain value,the value of friction coefficient is almost unchanged.The wear rate of the coatings is first increased and then decreased with the increasing of normal load,while that of balls exhibit the opposite rule,which is attributed to the easy tribo?hydration reaction of Si3N4 balls in water,and the contact surface becomes smooth,thus the friction coefficient and wear rate are reduced.