激光技术
激光技術
격광기술
Laser Technology
2015年
6期
869-872
,共4页
冯杰%范宗学%单常亮%魏欣芮%吴琴%杨永佳%周自刚
馮傑%範宗學%單常亮%魏訢芮%吳琴%楊永佳%週自剛
풍걸%범종학%단상량%위흔예%오금%양영가%주자강
激光光学%表面结构%热效应%铌酸锂%飞秒激光%温度场分布
激光光學%錶麵結構%熱效應%鈮痠鋰%飛秒激光%溫度場分佈
격광광학%표면결구%열효응%니산리%비초격광%온도장분포
laser optics%surface structure%thermal effect%lithium niobate%femtosecond laser%temperature field distribu-tion
为了研究飞秒激光与铌酸锂表面作用过程中热效应对其表面的影响,采用重复频率为25MHz、脉宽为100fs、平均输出功率为500mW的紧聚焦飞秒激光对铌酸锂表面进行刻蚀。通过建立热扩散理论模型,模拟重复频率25MHz的飞秒激光在刻蚀点的温度场分布,并通过电子显微镜对刻蚀点的形貌进行分析,发现刻蚀点从内至外形成了3种大小不同、排列疏密不同的颗粒状结构区域,且中心区域被高温烧蚀并伴有裂缝产生。通过能量色散谱仪对刻蚀点的3种不同结构区域中Nb和O元素的相对含量进行测量,结合刻蚀点的温度场分布、形貌和元素含量进行了分析。结果表明, Nb和O元素在温度场的驱动下向外扩散;两者的相对含量对刻蚀点的表面结构具有极大影响。这一结果对高重频飞秒激光刻蚀铌酸锂物理机制及应用的研究是有帮助的。
為瞭研究飛秒激光與鈮痠鋰錶麵作用過程中熱效應對其錶麵的影響,採用重複頻率為25MHz、脈寬為100fs、平均輸齣功率為500mW的緊聚焦飛秒激光對鈮痠鋰錶麵進行刻蝕。通過建立熱擴散理論模型,模擬重複頻率25MHz的飛秒激光在刻蝕點的溫度場分佈,併通過電子顯微鏡對刻蝕點的形貌進行分析,髮現刻蝕點從內至外形成瞭3種大小不同、排列疏密不同的顆粒狀結構區域,且中心區域被高溫燒蝕併伴有裂縫產生。通過能量色散譜儀對刻蝕點的3種不同結構區域中Nb和O元素的相對含量進行測量,結閤刻蝕點的溫度場分佈、形貌和元素含量進行瞭分析。結果錶明, Nb和O元素在溫度場的驅動下嚮外擴散;兩者的相對含量對刻蝕點的錶麵結構具有極大影響。這一結果對高重頻飛秒激光刻蝕鈮痠鋰物理機製及應用的研究是有幫助的。
위료연구비초격광여니산리표면작용과정중열효응대기표면적영향,채용중복빈솔위25MHz、맥관위100fs、평균수출공솔위500mW적긴취초비초격광대니산리표면진행각식。통과건립열확산이론모형,모의중복빈솔25MHz적비초격광재각식점적온도장분포,병통과전자현미경대각식점적형모진행분석,발현각식점종내지외형성료3충대소불동、배렬소밀불동적과립상결구구역,차중심구역피고온소식병반유렬봉산생。통과능량색산보의대각식점적3충불동결구구역중Nb화O원소적상대함량진행측량,결합각식점적온도장분포、형모화원소함량진행료분석。결과표명, Nb화O원소재온도장적구동하향외확산;량자적상대함량대각식점적표면결구구유겁대영향。저일결과대고중빈비초격광각식니산리물리궤제급응용적연구시유방조적。
In order to study thermal effect of femtosecond laser on the surface of LiNbO 3 crystal, LiNbO3 crystal surface was etched by tightly-focused femtosecond laser pulses with repetition rate of 25MHz, pulse duration of 100fs and average output power of 500mW.A theoretical thermal diffusion model was built to simulate the temperature filed distribution of the area etched by laser pulses with repetition rate of 25MHz, and the morphology of the etched area was analyzed by a scanning electron microscope .There were three regions with different sizes and densities from the inside to the outside of the etched area , and the central region was ablated by high temperature and was accompanied with the appearance of cracks .Relative contents of Nb and O at the three regions were measured by using energy dispersive spectroscopy and were analyzed with temperature field distribution and morphology .The result shows that Nb and O elements spread out under the drive of temperature field , and relative contents of Nb and O have an important influence on surface structure of etch area .The results are useful for mechanism research of the interaction between high repetition rate femtosecond laser and LiNbO 3 crystal .