机械制造与自动化
機械製造與自動化
궤계제조여자동화
Machine Building & Automation
2015年
5期
197-199,208
,共4页
气体挤压膜平台%控制系统%稳定悬浮
氣體擠壓膜平檯%控製繫統%穩定懸浮
기체제압막평태%공제계통%은정현부
gas squeeze-film stage%control system%stable suspension
为实现气体挤压膜悬浮平台的稳定悬浮，以STC12C5412AD单片机为核心，设计并制作了单自由度气体挤压膜悬浮平台控制系统的硬件电路，采用C语言编写了基于不完全微分PID控制算法的控制系统软件。利用所设计的控制系统进行试验，实现了气体挤压膜悬浮平台的稳定悬浮，达到了预期的效果。
為實現氣體擠壓膜懸浮平檯的穩定懸浮，以STC12C5412AD單片機為覈心，設計併製作瞭單自由度氣體擠壓膜懸浮平檯控製繫統的硬件電路，採用C語言編寫瞭基于不完全微分PID控製算法的控製繫統軟件。利用所設計的控製繫統進行試驗，實現瞭氣體擠壓膜懸浮平檯的穩定懸浮，達到瞭預期的效果。
위실현기체제압막현부평태적은정현부，이STC12C5412AD단편궤위핵심，설계병제작료단자유도기체제압막현부평태공제계통적경건전로，채용C어언편사료기우불완전미분PID공제산법적공제계통연건。이용소설계적공제계통진행시험，실현료기체제압막현부평태적은정현부，체도료예기적효과。
ln order to achieve the stable suspension of gas squeeze-film levitation stage, the control system of gas squeeze-film levi-tation stage is designed and tested. The CPU of the hardware circuit is STC12C5412AD MCU, and the software of the control system is written in C language, based on the principle of incomplete differential PlD control algorithm. An experiment is finished by the use of this control system, and the results show that the control system could meet the needs of stable suspension of gas squeeze-film levitation stage.
