仪表技术与传感器
儀錶技術與傳感器
의표기술여전감기
Instrument Technique and Sensor
2015年
9期
4-7
,共4页
揣荣岩%代全%王健%梁峭%衣畅
揣榮巖%代全%王健%樑峭%衣暢
췌영암%대전%왕건%량초%의창
加速度传感器%压阻式%高固有频率%微梁%多晶硅纳米膜%MEMS
加速度傳感器%壓阻式%高固有頻率%微樑%多晶硅納米膜%MEMS
가속도전감기%압조식%고고유빈솔%미량%다정규납미막%MEMS
acceleration sensor%piezoresistive%high natural frequency%miro-beam%polysilicon nanofilms%MEMS
基于微机电系统( MEMS)技术的加速度传感器因其性价比高、易于集成化而得到广泛应用,但在普通MEMS加速度敏感结构中仍然存在灵敏度和固有频率相互制约的弱点。为此,文中优化设计了一种压阻式新型加速度敏感结构,该结构在弹性梁加质量块的基本结构上引入了敏感微梁,在保证高灵敏度的同时,显著提高了固有频率。其灵敏度与固有频率的乘积可比普通MEMS加速度计提高25倍以上。
基于微機電繫統( MEMS)技術的加速度傳感器因其性價比高、易于集成化而得到廣汎應用,但在普通MEMS加速度敏感結構中仍然存在靈敏度和固有頻率相互製約的弱點。為此,文中優化設計瞭一種壓阻式新型加速度敏感結構,該結構在彈性樑加質量塊的基本結構上引入瞭敏感微樑,在保證高靈敏度的同時,顯著提高瞭固有頻率。其靈敏度與固有頻率的乘積可比普通MEMS加速度計提高25倍以上。
기우미궤전계통( MEMS)기술적가속도전감기인기성개비고、역우집성화이득도엄범응용,단재보통MEMS가속도민감결구중잉연존재령민도화고유빈솔상호제약적약점。위차,문중우화설계료일충압조식신형가속도민감결구,해결구재탄성량가질량괴적기본결구상인입료민감미량,재보증고령민도적동시,현저제고료고유빈솔。기령민도여고유빈솔적승적가비보통MEMS가속도계제고25배이상。
Acceleration sensors based on Micro-Electro-Mechanical System ( MEMS) technology have been widely applied due to their high cost-performance ratio and easy integration ,but there is still weakness of mutual constraint between sensitivity and nat-ural frequency .For this reason ,a new type of piezoresistive acceleration sensitive structure was designed in this paper .Based on a basic structure with elastic beam and mass ,a sensitive micro-beam was introduced to form the new structure ,which shows extremely high natural frequency and high sensitivity .The product value of sensitivity and natural frequency of the new structure is 25 times lager than normal MEMS acceleration sensors .