CAJ | 학술논문

采用金属醇盐为前驱体的溶胶-凝胶工艺,实现了 PLZT 反铁电厚膜晶圆级的制备.基于铅锆反铁电材料的相变应变效应和快速响应特性,结合微纳兼容制造关键技术,研制出具有大应变、快响应、低驱动特性的硅基(Pb,La)(Zr,Ti)O 3反铁电厚膜微悬臂梁构件.3种激励模式的测试结果表明,定频模式下梁的最大位移和速率相对于扫频模式下高出数倍,且定频模式(Square)更有利于激发反铁电材料相变,使得微悬臂梁驱动构件产生更大的应变和更快的响应速度,为大行程驱动位移和快速响应新型微执行构件的设计提供一种新的技术途径.
채용금속순염위전구체적용효-응효공예,실현료 PLZT 반철전후막정원급적제비.기우연고반철전재료적상변응변효응화쾌속향응특성,결합미납겸용제조관건기술,연제출구유대응변、쾌향응、저구동특성적규기(Pb,La)(Zr,Ti)O 3반철전후막미현비량구건.3충격려모식적측시결과표명,정빈모식하량적최대위이화속솔상대우소빈모식하고출수배,차정빈모식(Square)경유리우격발반철전재료상변,사득미현비량구동구건산생경대적응변화경쾌적향응속도,위대행정구동위이화쾌속향응신형미집행구건적설계제공일충신적기술도경.
Taking the metal alkoxide as a precursor,the wafer grade of (Pb,La)(Zr,Ti)O 3 (PLZT)anti-ferro-electric thick films were fabricated by the sol-gel process on silicon substrate.Based on the strong field induced strain and the sharp phase switching of anti-ferroelectric materials and combined with key technologies of micro-nano compatible manufacturing,the microcantilevers was presented with excellent large strain capacity,rapid response speed,low drive voltage.The experimental results of 3 excitation modes showed that the maximum displacement and velocity of microcantilevers under the fixed frequency (square)is several times larger than that under the sweep (or scan)frequency.The phase transition of anti-ferroelectric materials were so much more excited underthe fixed frequency (square)than that under the sweep frequency that caused the larger strain capabilities and higher response speed in the micro-cantilevers,which was a new technical approachto de-sign micro-actuators with characteristics of large drive displacementand rapid response.