CAJ | 학술논문

由于纳米级精度运动平台在电子隧道扫描显微镜、光刻机及精密医疗设备有广泛需求，传统驱动方式中大行程、高精度难以同时实现，而直线超声电机直接驱动的精密运动平台可望解决该问题。研究所建大行程直线超声电机系统位移分辨率影响因素，通过死区时间理论及启停实验曲线分析探索运动平台可能达到的最小步距；借助XL－80激光干涉仪，实验研究驱动波形、预压力及驱动电压对平台步距影响。结果显示，运动平台分辨率可达25 nm。
유우납미급정도운동평태재전자수도소묘현미경、광각궤급정밀의료설비유엄범수구，전통구동방식중대행정、고정도난이동시실현，이직선초성전궤직접구동적정밀운동평태가망해결해문제。연구소건대행정직선초성전궤계통위이분변솔영향인소，통과사구시간이론급계정실험곡선분석탐색운동평태가능체도적최소보거；차조XL－80격광간섭의，실험연구구동파형、예압력급구동전압대평태보거영향。결과현시，운동평태분변솔가체25 nm。
Nanometer-accuracystageiswidelyneededinthescanningtunnelingmicroscope(STM),lithography, precision medical equipments,and so on.In the traditional style of driving method,large stroke and high accuracy is as usual a pair of contradiction for precision stage.However,the precision stage driven by linear ultrasonic motor (LUSM) may reconcile the problem.For an established linear ultrasonic motors system,the influential factors to displacement resolution were studied.The possible minimum step of the stage was discussed in the light of the dead-time theory and the start-stop experimental curve.Then,under the help of XL-80 laser interferometer,the relationships between the micro-step distance of the stage and the driving factors,such as the driving waveform,pre-pressure and driving voltage,were studied respectively by experiments.The experimental results show that the displacement resolution is 25 nm.