CAJ | 학술논문

基于硅模具提出了一种吸铸成形 Zr 基非晶合金微零件的方法。采用真空氩弧熔化吸铸炉进行了非晶合金微零件吸铸成形实验，用红外热像仪测量了合金熔液温度，发现合金熔液在1116℃下能够完全复制宽3μm、深3μm 的硅方形微槽结构且具有较好的表面形貌。随后分别采用带有多型腔和双层型腔的硅模具进行了吸铸成形实验，成功制备了模数为50μm 的非晶合金微齿轮零件，微零件的硬度及弹性模量分别为6.49 GPa 和94.9 GPa。实验结果表明，基于硅模具吸铸成形 Zr 基非晶合金是一种制备高精度、高表面质量、高性能微零件的有效方法。
기우규모구제출료일충흡주성형 Zr 기비정합금미령건적방법。채용진공아호용화흡주로진행료비정합금미령건흡주성형실험，용홍외열상의측량료합금용액온도，발현합금용액재1116℃하능구완전복제관3μm、심3μm 적규방형미조결구차구유교호적표면형모。수후분별채용대유다형강화쌍층형강적규모구진행료흡주성형실험，성공제비료모수위50μm 적비정합금미치륜령건，미령건적경도급탄성모량분별위6.49 GPa 화94.9 GPa。실험결과표명，기우규모구흡주성형 Zr 기비정합금시일충제비고정도、고표면질량、고성능미령건적유효방법。
Using the silicon die,a suction casting process for fabricating Zr-based bulk metallic glass(BMG)micro-part was developed.The suction casting experiments were carried out with a vacu-um arc melting furnace,and the temperatures of the molten alloy were measured by an infrared camer-a.It is found that under 1 1 1 6 ℃ the molten alloy can completely duplicate the square silicon micro-grooves of 3 μmin width and 3 μm depth with a good surface.Then silicon dies with multi-cavity and double-layer cavity were used in suction casting experiments,and BMG micro-gears of 50 μm in modu-lus were fabricated successfully.The hardness and elastic modulus of the micro-parts are 6.49 GPa and 94.9 GPa.The results show that suction casting of Zr-based BMG with silicon die is a promising meth-od for fabricating micro-parts with high precision,good surface and excellent mechanical property.