CAJ | 학술논문

在自制的化学机械复合抛光装置上，研究了微晶玻璃小孔的高精度化学机械抛光技术，利用触针式轮廓仪对小孔抛光表面进行测量，讨论抛光浆料、主轴转速对表面粗糙度的影响。研究结果表明，采用化学机械复合抛光技术可使微晶玻璃的小孔具有更好的表面质量。
재자제적화학궤계복합포광장치상，연구료미정파리소공적고정도화학궤계포광기술，이용촉침식륜곽의대소공포광표면진행측량，토론포광장료、주축전속대표면조조도적영향。연구결과표명，채용화학궤계복합포광기술가사미정파리적소공구유경호적표면질량。
The machining micro holes of glass-ceramics were studied based on chemical mechanical polishing. The surface of micro hole was measured with a contact stylus profileron the foundation of the study at the device of the self-made. The influence of the polishing slurry and the spindle speed on the surface roughness was discussed. The results show that the technology of chemical mechanical polishing can make the micro hole of glass ceramics have a lower surface roughness.