CAJ | 학술논문

以钛掺杂氧化锌镓（ GZO）陶瓷靶作为溅射源材料，采用射频磁控溅射技术在玻璃基片上制备了掺钛GZO （ GZO：Ti）透明半导体薄膜，利用光谱拟合方法计算了GZO：Ti薄膜的折射度、消光系数和厚度等光学参数，研究了氩气压强对GZO：Ti 薄膜光学性质的影响。结果表明：拟合光谱曲线与实验测量光谱曲线一致，薄膜的光学性质与氩气压强密切相关，GZO：Ti薄膜折射率随波长增大而逐渐减小，表现出正常的色散性质。另外还采用包络法计算了GZO：Ti薄膜的折射率和厚度，两种方法所获得的结果是基本相符的。
이태참잡양화자가（ GZO）도자파작위천사원재료，채용사빈자공천사기술재파리기편상제비료참태GZO （ GZO：Ti）투명반도체박막，이용광보의합방법계산료GZO：Ti박막적절사도、소광계수화후도등광학삼수，연구료아기압강대GZO：Ti 박막광학성질적영향。결과표명：의합광보곡선여실험측량광보곡선일치，박막적광학성질여아기압강밀절상관，GZO：Ti박막절사솔수파장증대이축점감소，표현출정상적색산성질。령외환채용포락법계산료GZO：Ti박막적절사솔화후도，량충방법소획득적결과시기본상부적。
Transparent semiconductor titanium doped GZO ( GZO:Ti) thin films were deposited on the glass substrates by radio frequency magnetron sputtering technique using a sintered ceramic disc of ZnO mixed with TiO 2 and Ga2 O3 as a target.Based on the measured optical transmittance spectra , the refractive index, extinction and thickness of the deposited films were calculated using the spectrum fitting method , and the influence of argon pressure on the optical properties of the GZO:Ti thin films was investigated .The results show that the fitting curves are in satisfactory agreement with the observation data .The optical parameters of the deposited films are closely related to the argon pressure and the refractive index possesses the normal dispersion characteristics . Furthermore , the optical constants were determined from the measured transmittance spectra using the envelope method , and the results are consonant with those determined from the spectrum fitting method .