CAJ | 학술논문

为了减小电磁式时栅位移传感器的原始误差,提出了一种基于平面线圈的基波脉振磁场构造方法.通过研究现有电磁式时栅磁场构造方法和平面线圈磁场分布特性,利用各次谐波畸变率THD(Total Harmonic Distortion)最小的优化算法,得到平面线圈最优化布置参数,并且在数值分析和有限元分析软件中得到了验证.根据这些参数设置,设计了基于多匝方形平面线圈的新型电磁式时栅位移传感器.在150 mm量程内,新型时栅原始误差为-32μm~23μm,较现有电磁式时栅位移传感器减小了42.3%.
위료감소전자식시책위이전감기적원시오차,제출료일충기우평면선권적기파맥진자장구조방법.통과연구현유전자식시책자장구조방법화평면선권자장분포특성,이용각차해파기변솔THD(Total Harmonic Distortion)최소적우화산법,득도평면선권최우화포치삼수,병차재수치분석화유한원분석연건중득도료험증.근거저사삼수설치,설계료기우다잡방형평면선권적신형전자식시책위이전감기.재150 mm량정내,신형시책원시오차위-32μm~23μm,교현유전자식시책위이전감기감소료42.3%.
In order to reduce the original error of electromagnetic time-grating displacement sensor,a method based on planar coils for building the fundamental wave of pulsating magnetic field is proposed. Through the study of magnetic field generating method for traditional time-grating sensor and distribution of magnetic field generated by planar coils,an optimization algorithm that is restricted by Total Harmonic Distortion is presented. The optimal parameters of planar coils construction are obtained and verified in MATLAB and ANSOFT. Based on the structure parameters,a novel electromagnetic time-grating sensor with planar coils is designed. Calibrated by the optical grat-ing,the original error of the novel sensor is from-32μm to 23μm,42.3%lower than traditional time-grating sensor.