长春理工大学学报(自然科学版)
長春理工大學學報(自然科學版)
장춘리공대학학보(자연과학판)
Journal of Changchun University of Science and Technology
2015年
5期
17-21
,共5页
王培芳%向阳%王继凯%王琪
王培芳%嚮暘%王繼凱%王琪
왕배방%향양%왕계개%왕기
光学设计%光电显微镜%放大倍率%比长仪
光學設計%光電顯微鏡%放大倍率%比長儀
광학설계%광전현미경%방대배솔%비장의
optical design%optical microscope%magnification comparator
光电显微镜具有很高的灵敏度,能够消除测量过程中的主观性,提高测量过程的自动化与准确度.为了提高光电显微镜的测量精度,本文采用物方远心的原理设计了一应用于比长仪的物方远心光电显微镜.设计结果:视放大倍率Γ=100倍,物方线视场2 y=0.5mm,数值孔径NA=0.2,分辨率σ=1.68μm,工作距离28.5mm,光学系统波像差小于1/4λ,传递函数接近衍射极限.光电显微镜的光学测量误差小于0.7%.
光電顯微鏡具有很高的靈敏度,能夠消除測量過程中的主觀性,提高測量過程的自動化與準確度.為瞭提高光電顯微鏡的測量精度,本文採用物方遠心的原理設計瞭一應用于比長儀的物方遠心光電顯微鏡.設計結果:視放大倍率Γ=100倍,物方線視場2 y=0.5mm,數值孔徑NA=0.2,分辨率σ=1.68μm,工作距離28.5mm,光學繫統波像差小于1/4λ,傳遞函數接近衍射極限.光電顯微鏡的光學測量誤差小于0.7%.
광전현미경구유흔고적령민도,능구소제측량과정중적주관성,제고측량과정적자동화여준학도.위료제고광전현미경적측량정도,본문채용물방원심적원리설계료일응용우비장의적물방원심광전현미경.설계결과:시방대배솔Γ=100배,물방선시장2 y=0.5mm,수치공경NA=0.2,분변솔σ=1.68μm,공작거리28.5mm,광학계통파상차소우1/4λ,전체함수접근연사겁한.광전현미경적광학측량오차소우0.7%.
Photoelectric microscope has a high sensitivity and can eliminate the subjectivity in the process of measure-ment,improving the automation and accuracy of the measurement process. In order to improve the measurement preci-sion of the photoelectric microscope, this paper uses the tele-centric principle to design photoelectric microscope which is applied in length comparator. The system result:Γ=100,the object side view 2y=0.5mm,numerical aperture NA=0.2, the resolution of the σ=1.68μm, working distance=28.5mm. The optical system of wave aberration is less than 1/4λand transfer function is close to the diffraction limit. finally,the visual measurement error being less than 0.7%.