长春理工大学学报（自然科学版）
長春理工大學學報（自然科學版）
장춘리공대학학보（자연과학판）
Journal of Changchun University of Science and Technology
2015年
5期
9-13
,共5页
运动平台%机械误差%多体系统动力学%低序体阵列
運動平檯%機械誤差%多體繫統動力學%低序體陣列
운동평태%궤계오차%다체계통동역학%저서체진렬
motion platform%mechanical error%multibody system dynamics%lower numbered body array
为了确定母光栅刻划设备运动平台各项机械误差与设备最终刻划精度之间的数学关系,为设备的设计和制造提供相关理论依据.首先,采用多体系统动力学方法,确立了母光栅刻划设备运动平台的拓扑结构及低序体阵列.然后,分析确定了运动平台的机械误差所包含的各个误差项,并建立了运动平台机械误差与设备最终刻划误差之间的误差分析模型.最后,应用Matlab软件根据所建模型对母光栅刻划设备的刻划精度进行了仿真分析.仿真结果表明:各项机械误差综合结果在各轴向的分量都在±0.4μm范围之内,均满足母光栅刻划设备精度要求.所建立的误差分析模型具有简洁方便、便于编程等优点,可以作为设备设计时误差合成和误差分配的依据.
為瞭確定母光柵刻劃設備運動平檯各項機械誤差與設備最終刻劃精度之間的數學關繫,為設備的設計和製造提供相關理論依據.首先,採用多體繫統動力學方法,確立瞭母光柵刻劃設備運動平檯的拓撲結構及低序體陣列.然後,分析確定瞭運動平檯的機械誤差所包含的各箇誤差項,併建立瞭運動平檯機械誤差與設備最終刻劃誤差之間的誤差分析模型.最後,應用Matlab軟件根據所建模型對母光柵刻劃設備的刻劃精度進行瞭倣真分析.倣真結果錶明:各項機械誤差綜閤結果在各軸嚮的分量都在±0.4μm範圍之內,均滿足母光柵刻劃設備精度要求.所建立的誤差分析模型具有簡潔方便、便于編程等優點,可以作為設備設計時誤差閤成和誤差分配的依據.
위료학정모광책각화설비운동평태각항궤계오차여설비최종각화정도지간적수학관계,위설비적설계화제조제공상관이론의거.수선,채용다체계통동역학방법,학립료모광책각화설비운동평태적탁복결구급저서체진렬.연후,분석학정료운동평태적궤계오차소포함적각개오차항,병건립료운동평태궤계오차여설비최종각화오차지간적오차분석모형.최후,응용Matlab연건근거소건모형대모광책각화설비적각화정도진행료방진분석.방진결과표명:각항궤계오차종합결과재각축향적분량도재±0.4μm범위지내,균만족모광책각화설비정도요구.소건립적오차분석모형구유간길방편、편우편정등우점,가이작위설비설계시오차합성화오차분배적의거.
In order to establish the relationship between the mechanical errors of the motion platform and the ultimate accuracy for the master grating ruling engine,and provide a theoretical basis for the design and manufacture. First,the topological structure and the lower body array have been established, using the method of multibody system dynamics. Then after establishing the error components of the mechanical error of the motion platform, a analytical model be-tween the error components and the ultimate accuracy of the master grating ruling engine has been established. Finally, Matlab simulation for the accuracy of the master grating ruling engine based on the model has been accomplished. The simulation results indicate that every axial error component is within ±0.4μm range and meets the master grating ruling requirement. The model can be used as a theoretical basis of error synthesis and error allocation for instrument design, as well as its advantages of simple and convenient,and easy programming etc.
