CAJ | 학술논문

利用光栅衍射方程和严格耦合波理论，研究亚波长浮雕光栅的衍射效应对抗反射和增强透射的影响，理论分析表明：在只需要达到抗反射效果而不需要提高透射效率的条件下，除了微结构的折射率调制之外，可利用光栅衍射形成的横向波导共振来降低反射效率。实验结果与理论分析相一致：利用激光干涉光刻法制作了周期为290 nm的一维浮雕光栅，通过透射及反射光谱的测试，表明这种结构在大角度范围内对可见光波段有明显的抗反射效果，但是只有波长在非衍射区才具有透射增强效果，而在衍射区则透射降低。
이용광책연사방정화엄격우합파이론，연구아파장부조광책적연사효응대항반사화증강투사적영향，이론분석표명：재지수요체도항반사효과이불수요제고투사효솔적조건하，제료미결구적절사솔조제지외，가이용광책연사형성적횡향파도공진래강저반사효솔。실험결과여이론분석상일치：이용격광간섭광각법제작료주기위290 nm적일유부조광책，통과투사급반사광보적측시，표명저충결구재대각도범위내대가견광파단유명현적항반사효과，단시지유파장재비연사구재구유투사증강효과，이재연사구칙투사강저。
The diffraction effect of subwavelength relief grating on the antireflection and enhanced trans-missionis studied using grating diffraction equation and strict coupling wave theory.Theoretical analysis shows that beside the modulation of refractive index,under the condition that it is only necessary to a-chieve antireflection without need to improve transmission effect,the lateral waveguide resonance caused by grating diffraction can be used to reduce reflection efficiency.Experimental results are in accordance with theoretical analysis:a one-dimensional relief grating with period of 290 nm is fabricated by laser in-terference method.Results show that it has significant antireflection effect in the whole visible light wave band and wide angular range,but only has transmission enhanced effect as wavelength is in non-diffrac-tion area.