物理实验
物理實驗
물리실험
Physics Experimentation
2015年
11期
1-4
,共4页
超声%FeCl3 溶液%蚀刻%覆铜板%蚀刻速率
超聲%FeCl3 溶液%蝕刻%覆銅闆%蝕刻速率
초성%FeCl3 용액%식각%복동판%식각속솔
ultrasound%FeCl3 solution%etching%copper clad%etching rate
为了提高FeCl3溶液蚀刻覆铜板制作印制电路板的效率，采用超声强化FeCl3溶液蚀刻覆铜板，研究了蚀刻时间、蚀刻液浓度、温度、超声电功率和超声频率对覆铜板蚀刻速率的影响，并且与静态蚀刻对比。结果表明：超声强化FeCl3溶液蚀刻覆铜板的蚀刻速率随蚀刻时间的延长持续下降，蚀刻速率下降逐渐减缓；10 min内的平均蚀刻速率随浓度的提高而增大，随蚀刻液温度的升高而增大，随超声电功率的增加先增加后减少（在超声电功率为80 W时达到最大），随超声频率的增加有降低的趋势。超声强化蚀刻和静态蚀刻的对比结果可以说明：超声波在FeCl3溶液蚀刻覆铜板中可以起到良好的强化作用。
為瞭提高FeCl3溶液蝕刻覆銅闆製作印製電路闆的效率，採用超聲彊化FeCl3溶液蝕刻覆銅闆，研究瞭蝕刻時間、蝕刻液濃度、溫度、超聲電功率和超聲頻率對覆銅闆蝕刻速率的影響，併且與靜態蝕刻對比。結果錶明：超聲彊化FeCl3溶液蝕刻覆銅闆的蝕刻速率隨蝕刻時間的延長持續下降，蝕刻速率下降逐漸減緩；10 min內的平均蝕刻速率隨濃度的提高而增大，隨蝕刻液溫度的升高而增大，隨超聲電功率的增加先增加後減少（在超聲電功率為80 W時達到最大），隨超聲頻率的增加有降低的趨勢。超聲彊化蝕刻和靜態蝕刻的對比結果可以說明：超聲波在FeCl3溶液蝕刻覆銅闆中可以起到良好的彊化作用。
위료제고FeCl3용액식각복동판제작인제전로판적효솔，채용초성강화FeCl3용액식각복동판，연구료식각시간、식각액농도、온도、초성전공솔화초성빈솔대복동판식각속솔적영향，병차여정태식각대비。결과표명：초성강화FeCl3용액식각복동판적식각속솔수식각시간적연장지속하강，식각속솔하강축점감완；10 min내적평균식각속솔수농도적제고이증대，수식각액온도적승고이증대，수초성전공솔적증가선증가후감소（재초성전공솔위80 W시체도최대），수초성빈솔적증가유강저적추세。초성강화식각화정태식각적대비결과가이설명：초성파재FeCl3용액식각복동판중가이기도량호적강화작용。
In order to improve the manufacturing efficiency of printed circuit board ,ultrasonic ir‐radiation was adopted to enhance the etch rates of copper clad in FeCl3 solution .The effects of etch time ,concentration of the etch solution ,temperature ,ultrasonic power and ultrasonic frequency on the etch rates were studied .The results showed that the etch rates were enhanced by ultrasonic irradi‐ation ,but the enhancement decreased gradually with etch time ,and the decreasing rate slowed down with time .The average etch rate within 10 min increased with increasing concentration and tempera‐ture .The etch rates climbed up and then declined with the increase of ultrasonic irradiation power and reached its maximum at 80 W .The etch rates decreased with increasing ultrasonic irradiation frequen‐cy .Compared with static etching ,ultrasonic irradiation could ,under the same conditions ,enhance the etch rates of copper clad in FeCl3 solution .
