实验技术与管理
實驗技術與管理
실험기술여관리
Experimental Technology and Management
2015年
11期
47-50,61
,共5页
薄膜电感%矢量网络分析仪%探针台
薄膜電感%矢量網絡分析儀%探針檯
박막전감%시량망락분석의%탐침태
thin-film inductor%vector network analyzer%probe station
微器件的测试是保证器件质量和发展的关键手段。介绍了由矢量网络分析仪与探针台结合组成的薄膜电感测试系统，详细讲述了薄膜电感的测试原理及方法，实验样品验证了方法的正确性和可行性。
微器件的測試是保證器件質量和髮展的關鍵手段。介紹瞭由矢量網絡分析儀與探針檯結閤組成的薄膜電感測試繫統，詳細講述瞭薄膜電感的測試原理及方法，實驗樣品驗證瞭方法的正確性和可行性。
미기건적측시시보증기건질량화발전적관건수단。개소료유시량망락분석의여탐침태결합조성적박막전감측시계통，상세강술료박막전감적측시원리급방법，실험양품험증료방법적정학성화가행성。
With the rapid development of device miniaturization,the testing method is also crucial.The micro device testing is the key to ensure the quality of components and development.This article firstly introduces the vector network analyzer and probe station consisting of a thin film inductance testing system.And then, the film inductance principle and the method are described in detail.Finally,the experimental samples verify the validity and feasibility of the method.
