光电工程
光電工程
광전공정
Opto-Electronic Engineering
2015年
11期
37-42
,共6页
娄树旗%白剑%卢乾波%廉文秀%焦旭芬
婁樹旂%白劍%盧乾波%廉文秀%焦旭芬
루수기%백검%로건파%렴문수%초욱분
光栅干涉%激光器%光源扰动%补偿光路%比例运算
光柵榦涉%激光器%光源擾動%補償光路%比例運算
광책간섭%격광기%광원우동%보상광로%비례운산
grating interference%lasers%light disturbance%compensation of optical path%scaling operation
基于光栅干涉原理的高精度微位移测量装置电压灵敏度高，微弱的抖动都会影响测量精度，这些抖动包括空气波动，地面震动，光源波动等，因而如何有效抑制外界抖动对微位移测量结果的影响显得至关重要。本文首先针对实验所用光源线偏振He-Ne激光器的功率波动性进行实验和分析，得出光源的功率波动范围大于7%，超出1%的波动限制；然后采用两路信号采集的补偿措施，后经比例运算降低光源波动对输出电压的影响，实现抗光源扰动的目的。通过对实验数据的分析得出经过补偿光路和比例运算以后输出电压受光源波动的影响得到了有效抑制，最终输出电压的波动幅度较初始状态降低了60%，位移测量误差从1.95×10-7 m降低到1.40×10-8 m。
基于光柵榦涉原理的高精度微位移測量裝置電壓靈敏度高，微弱的抖動都會影響測量精度，這些抖動包括空氣波動，地麵震動，光源波動等，因而如何有效抑製外界抖動對微位移測量結果的影響顯得至關重要。本文首先針對實驗所用光源線偏振He-Ne激光器的功率波動性進行實驗和分析，得齣光源的功率波動範圍大于7%，超齣1%的波動限製；然後採用兩路信號採集的補償措施，後經比例運算降低光源波動對輸齣電壓的影響，實現抗光源擾動的目的。通過對實驗數據的分析得齣經過補償光路和比例運算以後輸齣電壓受光源波動的影響得到瞭有效抑製，最終輸齣電壓的波動幅度較初始狀態降低瞭60%，位移測量誤差從1.95×10-7 m降低到1.40×10-8 m。
기우광책간섭원리적고정도미위이측량장치전압령민도고，미약적두동도회영향측량정도，저사두동포괄공기파동，지면진동，광원파동등，인이여하유효억제외계두동대미위이측량결과적영향현득지관중요。본문수선침대실험소용광원선편진He-Ne격광기적공솔파동성진행실험화분석，득출광원적공솔파동범위대우7%，초출1%적파동한제；연후채용량로신호채집적보상조시，후경비례운산강저광원파동대수출전압적영향，실현항광원우동적목적。통과대실험수거적분석득출경과보상광로화비례운산이후수출전압수광원파동적영향득도료유효억제，최종수출전압적파동폭도교초시상태강저료60%，위이측량오차종1.95×10-7 m강저도1.40×10-8 m。
Micro displacement measuring device with high precision based on the principle of grating interference has high voltage sensitivity, thus weak jitter can cause irreparable impact on measuring results. These jitters include the air jitter, the ground vibration, and the fluctuation of the light source, etc. It becomes crucial for how to restrain the influence of outside jitter on the measurements of micro displacement effectively. Firstly, a series of experiments and analyses was carried on for the power fluctuation of the linearly polarized He-Ne laser, which drew that the power fluctuation range of light was greater than 7% which exceeded the fluctuation limit of 1%. Then, using the compensation measures of two signal acquisition and scaling operation, anti light disturbance came true. The analysis of experimental data shows that the effect of light source fluctuation on output voltage can be suppressed effectively through the compensation of optical path and scaling operation. The final amplitude of fluctuation of the output voltage is reduced by 60% than the initial state, and the displacement measurement error reduced from 1.95×10-7m to 1.40×10-8m.
