CAJ | 학술논문

室温下在玻璃和聚酰亚胺两种不同衬底上,采用射频磁控溅射法溅射掺铝氧化锌( AZO)粉末靶和固体Ag靶,制备了两组AZO/Ag/AZO 3层透明导电薄膜,研究了AZO层厚度对不同衬底3层膜结构和光电性能的影响. 结果表明:不同衬底的两组AZO/Ag/AZO薄膜均为多晶膜. 当Ag层厚度不变时,随着AZO层厚度的增加,两组薄膜电学性能变化不大,透射峰向长波方向移动. 玻璃和PI衬底上制备的AZO(30 nm)/Ag (14 nm)/AZO(30 nm)薄膜,在550 nm处的透光率分别为85%和70%,方块电阻分别为2. 6 Ω/□和4. 6Ω/□.
실온하재파리화취선아알량충불동츤저상,채용사빈자공천사법천사참려양화자( AZO)분말파화고체Ag파,제비료량조AZO/Ag/AZO 3층투명도전박막,연구료AZO층후도대불동츤저3층막결구화광전성능적영향. 결과표명:불동츤저적량조AZO/Ag/AZO박막균위다정막. 당Ag층후도불변시,수착AZO층후도적증가,량조박막전학성능변화불대,투사봉향장파방향이동. 파리화PI츤저상제비적AZO(30 nm)/Ag (14 nm)/AZO(30 nm)박막,재550 nm처적투광솔분별위85%화70%,방괴전조분별위2. 6 Ω/□화4. 6Ω/□.
The sandwich films composed of aluminum ions doped zinc oxide ( AZO)/silver( Ag)/AZO films were prepared on polyimide ( PI) and glass substrates by RF magnetron sputtering using the powder AZO target and the solid Ag target at room temperature. The effect of the thicknesses of AZO layers on the structure, optical and electrical properties of the sandwich films was investigated. The results show that the as-deposited films are polycrystalline on both PI and glass substrates. The changes of the electrical properties of the sandwich films are not obvious, and the positions of the highest transmittance shift towards the long wavelength region with the increasing of AZO thickness. When the thicknesses of the films are 30 nm of AZO and 14 nm of Ag, the sheet resistances are as low as 2. 6 Ω/□ and 4. 6 Ω/□on glass and PI substrates, respectively. The transmittances of the films at 550 nm are 85% on glass and 70% on PI substrates.