CAJ | 학술논문

实际半导体制造过程调度问题具有大规模、不确定、带复杂约束及多目标等综合复杂性，要确保上述生产过程优化运行，必须及时有效进行动态调度。鉴于半导体生产线具有多重入特征及紧急订单对常规订单产生影响，本文给出一种基于“鼓-缓冲-绳子”（Drum-Buffer-Rope，DBR）和自适应模糊推理系统（Adaptive Neuro-Fuzzy Inference Sys-tem，ANFIS）相融合的半导体生产线动态调度方法。首先以最大化瓶颈设备有效产能及保证生产线负荷均衡为目标，将投料控制与工件调度有机结合进行 DBR 优化算法设计；其次根据生产线运行过程中积累大量的历史数据与实时数据，利用 ANFIS 构建紧急订单相关信息预测模型；再次结合专家经验知识，利用模糊推理系统将预测结果与相应的DBR 算法相融合，使生产线提前调整投料策略，保证紧急订单到来时生产线能够有效完成其加工任务及减小紧急订单与常规订单之间的相互影响；最后通过某半导体生产线进行仿真验证，该方法能够实现生产线的多目标优化，为解决实际半导体生产调度问题提供参考。
실제반도체제조과정조도문제구유대규모、불학정、대복잡약속급다목표등종합복잡성，요학보상술생산과정우화운행，필수급시유효진행동태조도。감우반도체생산선구유다중입특정급긴급정단대상규정단산생영향，본문급출일충기우“고-완충-승자”（Drum-Buffer-Rope，DBR）화자괄응모호추리계통（Adaptive Neuro-Fuzzy Inference Sys-tem，ANFIS）상융합적반도체생산선동태조도방법。수선이최대화병경설비유효산능급보증생산선부하균형위목표，장투료공제여공건조도유궤결합진행 DBR 우화산법설계；기차근거생산선운행과정중적루대량적역사수거여실시수거，이용 ANFIS 구건긴급정단상관신식예측모형；재차결합전가경험지식，이용모호추리계통장예측결과여상응적DBR 산법상융합，사생산선제전조정투료책략，보증긴급정단도래시생산선능구유효완성기가공임무급감소긴급정단여상규정단지간적상호영향；최후통과모반도체생산선진행방진험증，해방법능구실현생산선적다목표우화，위해결실제반도체생산조도문제제공삼고。
The scheduling problem of actual semiconductor production process is of large scale,uncertainty,complicated con-straints and multiple objectives,and the optimization of the process depends upon a timely and efficient dynamic scheduling.Consid-ering the multi-reentrant characteristic of semiconductor wafer fabrication and the influence of rush orders upon regular orders,a Drum-Buffer-Rope (DBR)theory and Adaptive Neuro-Fuzzy Inference System (ANFIS)integrated dynamic scheduling algorithm is proposed.Firstly,a DBR optimization algorithm based on the combination of releasing control and lots scheduling is designed, aiming at maximizing the effective capacity of bottleneck equipment and ensuring the wafer fabrication load in a balance.Secondly, using the historical and real-time data obtained in the wafer fabrication,a prediction model of rush orders is constructed on the basis of ANFIS.Thirdly,the prediction result is integrated with the DBR algorithm combined with the experts’knowledge and practice experiment,to adjust the wafer fabrication before rush orders come,which guarantees that the rush order could be completed effec-tively,and reduces the interplay between the rush order and the regular one.The proposed scheduling algorithm is simulated on a certain semiconductor wafer fabrication system,and the result shows that the method can realize the multi-objective optimization and provide reference to the practical semiconductor wafer fabrication scheduling.