CAJ | 학술논문

基于铝亚微米金属化结构，研究了金属导线侧壁变形的成因和影响。发现氧化硅空洞和热应力是导致金属导线侧壁变形的重要因素，比较了不同间隙宽度对氧化硅填充能力和金属变形的影响，利用热处理温度增加和应力变化加剧金属变形来了解失效模式，分析了铝线尺寸设计与实际间隙宽度的关系，提出了利用设计最佳化来解决金属导线变形的问题。
기우려아미미금속화결구，연구료금속도선측벽변형적성인화영향。발현양화규공동화열응력시도치금속도선측벽변형적중요인소，비교료불동간극관도대양화규전충능력화금속변형적영향，이용열처리온도증가화응력변화가극금속변형래료해실효모식，분석료려선척촌설계여실제간극관도적관계，제출료이용설계최가화래해결금속도선변형적문제。
Base on Aluminum sub-micrometer metallization structure, the reason and impact of metal line sidewall distortion has been studied. Oxide void and thermal stress was found to be key factor which induced metal line sidewall distortion. The effect of different width between metal lines on oxide gap filling ability and metal distortion has been compared. The metal distortion was intensified by anneal temp increasing and various film stress to realize the failure mode. The space width correlation of metal design size and actual metal size has been analyzed. The metal distortion problem was solved by design optimization.