CAJ | 학술논문

本文结合湿法腐蚀技术、紫外固化纳米压印技术、热压纳米压印技术制备出聚甲基丙烯酸甲酯（PMMA）沟槽微结构，基于局部加热的自封装技术成功制备出了 PMMA微流控通道。研究了硅模板结构参数的选择要求以及工艺过程中实验参数对实验的影响。实验结果表明，热硅片与基片相对运动方向应与PMMA沟槽微结构方向平行，有利于制备出变形量小、尺寸均匀的微流控通道。
본문결합습법부식기술、자외고화납미압인기술、열압납미압인기술제비출취갑기병희산갑지（PMMA）구조미결구，기우국부가열적자봉장기술성공제비출료 PMMA미류공통도。연구료규모판결구삼수적선택요구이급공예과정중실험삼수대실험적영향。실험결과표명，열규편여기편상대운동방향응여PMMA구조미결구방향평행，유리우제비출변형량소、척촌균균적미류공통도。
Poly methyl methacrylate (PMMA) grooved microstructure was fabricated using the technology of wet etching, UV nano-imprint lithography (UV-NIL) and hot embossing nano-imprint lithography (HE-NIL). PMMA microfluidic channel was successfully fabricated based on the local heating self-sealing technology. This paper presents the requirement of silicon template structure parameters and the effect of experimental parameters on the experiment. The experimental result indicates that, the relative speed direction between the substrate and the thermal silicon should be consistent with the direction of PMMA groove. This method is conducive to the fabrication of microfluidic channels with small deformation amount and uniform size.