CAJ | 학술논문

本文提出利用氦质谱检漏仪测量聚合物薄膜渗透性能的方法，即通过聚对苯二甲酸乙二醇酯（PET）、聚二甲基硅氧烷（PDMS）、聚酰亚胺（PI）等三种聚合物薄膜对氦（He）的渗透率的测量，结合菲克定律计算相应的薄膜渗透率，并分析比较三种薄膜对 He渗透率的大小。实验结果表明三种聚合物薄膜（PET、PDMS、PI）对氦的渗透率分别为：1.07×10-7 Pa·m3/s、2.01×10-6 Pa·m3/s、1.04×10-5 Pa·m3/s，由于玻璃转变温度的差异，三种薄膜渗透率的大小如下：PDMS>PI>PET ,玻璃转变温度最高的 PET 对 He 的渗透率最小。本文测试方法的相对合成不确定度为5.79%，且该测试系统进行薄膜渗透性的测试具有测量时间短，操作简单，结果精确等优点。
본문제출이용양질보검루의측량취합물박막삼투성능적방법，즉통과취대분이갑산을이순지（PET）、취이갑기규양완（PDMS）、취선아알（PI）등삼충취합물박막대양（He）적삼투솔적측량，결합비극정률계산상응적박막삼투솔，병분석비교삼충박막대 He삼투솔적대소。실험결과표명삼충취합물박막（PET、PDMS、PI）대양적삼투솔분별위：1.07×10-7 Pa·m3/s、2.01×10-6 Pa·m3/s、1.04×10-5 Pa·m3/s，유우파리전변온도적차이，삼충박막삼투솔적대소여하：PDMS>PI>PET ,파리전변온도최고적 PET 대 He 적삼투솔최소。본문측시방법적상대합성불학정도위5.79%，차해측시계통진행박막삼투성적측시구유측량시간단，조작간단，결과정학등우점。
We proposed a measurement system based on the Helium leak detector to measure gas fluxes through different polymer membranes. In order to demonstrate the validity of the new system, helium permeation measurements through the PET, PDMS, PI were presented, and the permeant rate of these polymer membranes were obtained by the Fick law. In our experiment, the permeant rate of polymer membranes decreases in the following order: PDMS>PI>PET (QPET=1.07 ×10-7 Pa·m3/s, QPDMS=2.01×10-6 Pa·m3/s, QPI=1.04×10-5 Pa·m3/s)and the permeant rate of PET is the smallest with the highest glassy transition temperature. The total uncertainty of the permeant rate is about 5.79%.We show a novel permeation approach to allow precise measurement with short time and simple operation.