电子测试
電子測試
전자측시
Electronic Test
2015年
20期
70-71
,共2页
微电子%可靠性%影响因素%提升措施
微電子%可靠性%影響因素%提升措施
미전자%가고성%영향인소%제승조시
microelectronics%reliability%influencing factors%promotion measures
可靠性是关系产品质量的重要部分.在IC生产环节,微电子工艺的可靠性起着决定性的作用.本文在对微电子工艺可靠性进行简要阐述基础上,指出了研究微电子工艺可靠性必须注意的三个基本出发点,并从原材料控制、设备与工艺控制、环境洁净度控制等方面探讨了提升微电子工艺可靠性的具体措施.
可靠性是關繫產品質量的重要部分.在IC生產環節,微電子工藝的可靠性起著決定性的作用.本文在對微電子工藝可靠性進行簡要闡述基礎上,指齣瞭研究微電子工藝可靠性必鬚註意的三箇基本齣髮點,併從原材料控製、設備與工藝控製、環境潔淨度控製等方麵探討瞭提升微電子工藝可靠性的具體措施.
가고성시관계산품질량적중요부분.재IC생산배절,미전자공예적가고성기착결정성적작용.본문재대미전자공예가고성진행간요천술기출상,지출료연구미전자공예가고성필수주의적삼개기본출발점,병종원재료공제、설비여공예공제、배경길정도공제등방면탐토료제승미전자공예가고성적구체조시.
Reliability is an important part of the relationship between product quality. In IC production processes, reliability microelectronic technology plays a decisive role. In this paper, the reliability of microelectronic process briefly described on the basis of identified three basic starting point microelectronics research process reliability must be noted and discussed the promotion of micro control from raw materials, equipment and process control, environmental control and other aspects of cleanliness specific measures electronic process reliability.
