CAJ | 학술논문

在片S参数测量系统在半导体行业裸芯片测量中得到了广泛的应用,但是国内在片S参数测量系统无法有效溯源的现状影响了高端裸芯片产品的研发进度. 为了建立该类系统的校准能力,本文研制了微带形式的在片校准件、在片传递标准件和在片检验件三类标准样片,搭建了高准确度的在片S参数传递标准件定标系统,通过HFSS仿真方法使得在片S参数溯源至几何量基准,最终建立了在片S参数测量系统中传输参数的计量校准能力,为最终完成在片S参数测量系统校准奠定了技术基础.
재편S삼수측량계통재반도체행업라심편측량중득도료엄범적응용,단시국내재편S삼수측량계통무법유효소원적현상영향료고단라심편산품적연발진도. 위료건립해류계통적교준능력,본문연제료미대형식적재편교준건、재편전체표준건화재편검험건삼류표준양편,탑건료고준학도적재편S삼수전체표준건정표계통,통과HFSS방진방법사득재편S삼수소원지궤하량기준,최종건립료재편S삼수측량계통중전수삼수적계량교준능력,위최종완성재편S삼수측량계통교준전정료기술기출.
On-wafer S-parameter measurement system has been widely applied in bare chip meas-urement in the semiconductor industry, but the current situation of the ineffective traceability of domestic on-wafer S-parameter measurement system has influenced the R&D process of high-end bare chip prod-ucts. To develop the calibration capacity of this measurement, this paper developed strip on-wafer cali-bration standard, on-wafer transmit calibration standard and on-wafer verification standard, built high ac-curacy on-wafer S-parameter transmit standard calibration system, traced on-wafer S-parameter to geomet-ric basis through HFSS simulation method, and then finally built the calibration capacity with on-wafer S-parameter transmit parameter , laid the technical foundation for completing the on-wafer S-parameter measurement system finally.