CAJ | 학술논문

利用 FLUENT 软件模拟了 CVD 法制备 ZnO 时双管管式炉内流场的分布。研究了在无化学反应发生时,重力对 Zn 蒸汽分布的影响,以及在有化学反应发生时,保持进气总量不变的情况下,O2含量对 ZnO 质量分布和反应速率分布的影响。模拟结果表明：重力有利于 Zn 蒸汽由内管向外管的扩散及 Zn 蒸汽与 O2的充分接触；当有化学反应时,保持进气总量不变,最大反应速率及对应的 ZnO 质量分数随着 O2含量减小而增大；反应生成的 ZnO 主要均匀分布在管式炉外管的下游区域。
이용 FLUENT 연건모의료 CVD 법제비 ZnO 시쌍관관식로내류장적분포。연구료재무화학반응발생시,중력대 Zn 증기분포적영향,이급재유화학반응발생시,보지진기총량불변적정황하,O2함량대 ZnO 질량분포화반응속솔분포적영향。모의결과표명：중력유리우 Zn 증기유내관향외관적확산급 Zn 증기여 O2적충분접촉；당유화학반응시,보지진기총량불변,최대반응속솔급대응적 ZnO 질량분수수착 O2함량감소이증대；반응생성적 ZnO 주요균균분포재관식로외관적하유구역。
The author of this paper has simulated the flow field in the dual-tube furnace in the preparation of ZnO by CVD with the software of FLUENT,and studied the influence of gravity on the distribution of Zn vapor in the absence of chemical reaction and the influence of the differ-ent proportions of O2 on the distribution of ZnO mass and the distribution of reaction rates in the case of chemical reaction with the unchanged total intake of air.The simulation results show that gravity is conducive to the diffusion of Zn vapor from inside the tubes and to outside the tubes and the contact between Zn vapor and O2 ,that when there is a chemical reaction with the total intake of air unchanged,the maximum reaction rate and the corresponding mass fraction of ZnO decrea-ses with the increase of O2 ,and that ZnO is uniformly distributed in the downstream region of the outer tubes of the furnace tube.