传感技术学报
傳感技術學報
전감기술학보
Chinese Journal of Sensors and Actuators
2015年
11期
1620-1624
,共5页
集成气体传感器阵列%单片集成%微热板%Hspice%仿真分析
集成氣體傳感器陣列%單片集成%微熱闆%Hspice%倣真分析
집성기체전감기진렬%단편집성%미열판%Hspice%방진분석
integrated gas sensor array%monolithic integration%MHP (micro-hotplate)%hspice%simulation analysis
针对加热测温一体化集成微热板阵列气体传感器的需要，以微热板加热性能测试参数为依据，提出了一种基于微热板气体传感器阵列的单片集成方案。该方案包括由四个微热板构成的传感器阵列，加热驱动单元和信号采集单元。采用Hspice软件对加热驱动电路和信号采集电路进行设计，并进行了芯片电路系统的仿真。仿真结果表明实现了微热板的独立控温和信号的采集，验证了该方案的可行性和正确性。
針對加熱測溫一體化集成微熱闆陣列氣體傳感器的需要，以微熱闆加熱性能測試參數為依據，提齣瞭一種基于微熱闆氣體傳感器陣列的單片集成方案。該方案包括由四箇微熱闆構成的傳感器陣列，加熱驅動單元和信號採集單元。採用Hspice軟件對加熱驅動電路和信號採集電路進行設計，併進行瞭芯片電路繫統的倣真。倣真結果錶明實現瞭微熱闆的獨立控溫和信號的採集，驗證瞭該方案的可行性和正確性。
침대가열측온일체화집성미열판진렬기체전감기적수요，이미열판가열성능측시삼수위의거，제출료일충기우미열판기체전감기진렬적단편집성방안。해방안포괄유사개미열판구성적전감기진렬，가열구동단원화신호채집단원。채용Hspice연건대가열구동전로화신호채집전로진행설계，병진행료심편전로계통적방진。방진결과표명실현료미열판적독립공온화신호적채집，험증료해방안적가행성화정학성。
Aiming at the application requirements of the integrated MHP(Micro-hotplate) gas sensor array,a mono?lithic integrated scheme was proposed based on the test parameters of the Micro-hotplate's heating performance.The scheme consisted of four MHP gas sensor array,heating driver block and signal acquisition block. The chip circuit was designed by using Hspice and simulation analysis was accomplished.The simulation results showed that the pro?posed chip circuit met the design requirement. The independent temperature control of MHP and the signal acquisi?tion were realized.The feasibility and correctness of the scheme was verified.
