电子科技大学学报
電子科技大學學報
전자과기대학학보
Journal of University of Electronic Science and Technology of China
2015年
6期
851-857
,共7页
衍射%光栅%测试%严格耦合波分析%层吸收法
衍射%光柵%測試%嚴格耦閤波分析%層吸收法
연사%광책%측시%엄격우합파분석%층흡수법
diffraction%grating%measurements%rigorous couple wave analysis%slice absorption method
通过将严格耦合波分析的傅里叶展开过程与一种差分技术——层吸收法(SAM)的高斯消元迭代过程相结合，实现对任意复杂光栅零级衍射场的计算。在满足精度要求条件下，如果SAM所需网格数小于RCWA所需阶梯近似层数的两倍左右， SAM更高效；对于示例结构，相对于RCWA，SAM最高可以减少40%的计算时间。因此该方法具有辅助应用于集成电路纳米量级微结构分析/测试的价值。
通過將嚴格耦閤波分析的傅裏葉展開過程與一種差分技術——層吸收法(SAM)的高斯消元迭代過程相結閤，實現對任意複雜光柵零級衍射場的計算。在滿足精度要求條件下，如果SAM所需網格數小于RCWA所需階梯近似層數的兩倍左右， SAM更高效；對于示例結構，相對于RCWA，SAM最高可以減少40%的計算時間。因此該方法具有輔助應用于集成電路納米量級微結構分析/測試的價值。
통과장엄격우합파분석적부리협전개과정여일충차분기술——층흡수법(SAM)적고사소원질대과정상결합，실현대임의복잡광책령급연사장적계산。재만족정도요구조건하，여과SAM소수망격수소우RCWA소수계제근사층수적량배좌우， SAM경고효；대우시례결구，상대우RCWA，SAM최고가이감소40%적계산시간。인차해방법구유보조응용우집성전로납미량급미결구분석/측시적개치。
The rigorous couple wave analysis (RCWA) is widely used in structure analysis/testing of integrated circuit (IC), in particular, efficient for gratings with vertical sidewalls. But for a complex grating, its efficiency is reduced due to the staircase approximation. Here we present a rapid calculation method of 0’s order diffraction field for arbitrary grating, which combines RCWA with the slice absorption method (SAM). Under a given accuracy requirement, when the girds needed by SAM are less than double of the staircase approximation slices needed by RCWA, the SAM is more efficient. In the numerical examples, a calculation time up to 40% of RCWA is reduced by SAM. Therefore, SAM could be the auxiliary method to RCWA in the nanoscale IC application.
