CAJ | 학술논문

利用射频磁控溅射技术在LaNiO3/SiO2/Si基底上制备了Pb( Mg1/3 Nb2/3) O3-PbTiO3/CoFe2 O4和Pb( Mg1/3 Nb2/3) O3-PbTiO3/CoFe2 O4/Pb( Mg1/3 Nb2/3) O3-PbTiO3两种复合薄膜．我们采取了三种退火条件对复合薄膜进行退火处理,研究两种复合薄膜的晶体结构、电学和磁学性能．通过对两种复合薄膜的结构的分析,发现两步法退火后得到复合薄膜同时存在纯钙钛矿相和尖晶石相两种结构．铁电性能测试表明,两种复合薄膜均具有较好的铁电性能,其中三层复合薄膜的剩余极化强度Pr 最大可以达到14．9μC/cm2,这要归因于多层复合薄膜内部的应力-应变效应和界面耦合效应．在电场强度为80 kV/cm的漏电流密度数量级仅10-5 A/cm2,其导电机制在高电场区满足Schottky机制．介频性能测试表明：复合薄膜的介频特性较差,双层复合薄膜的介电性能较好,其介电常数εr 为1078,其介电损耗tgδ较大,约为0．43．此外,对复合薄膜的磁滞回线测试表明：两种复合薄膜中均存在磁学性能,且双层结构复合薄膜的铁磁性能较大,其饱和磁化强度Ms 为119 emu/cm3,剩余磁化强度Mr 达到31．6 emu/cm3,矫顽场Hc 为1360 Oe．以上测试结果表明,铁电有序和磁有序可以存在于钙钛矿-尖晶石结构当中,通过多层复合和合适退火方式可以增强其铁电和介电性能．
이용사빈자공천사기술재LaNiO3/SiO2/Si기저상제비료Pb( Mg1/3 Nb2/3) O3-PbTiO3/CoFe2 O4화Pb( Mg1/3 Nb2/3) O3-PbTiO3/CoFe2 O4/Pb( Mg1/3 Nb2/3) O3-PbTiO3량충복합박막．아문채취료삼충퇴화조건대복합박막진행퇴화처리,연구량충복합박막적정체결구、전학화자학성능．통과대량충복합박막적결구적분석,발현량보법퇴화후득도복합박막동시존재순개태광상화첨정석상량충결구．철전성능측시표명,량충복합박막균구유교호적철전성능,기중삼층복합박막적잉여겁화강도Pr 최대가이체도14．9μC/cm2,저요귀인우다층복합박막내부적응력-응변효응화계면우합효응．재전장강도위80 kV/cm적루전류밀도수량급부10-5 A/cm2,기도전궤제재고전장구만족Schottky궤제．개빈성능측시표명：복합박막적개빈특성교차,쌍층복합박막적개전성능교호,기개전상수εr 위1078,기개전손모tgδ교대,약위0．43．차외,대복합박막적자체회선측시표명：량충복합박막중균존재자학성능,차쌍층결구복합박막적철자성능교대,기포화자화강도Ms 위119 emu/cm3,잉여자화강도Mr 체도31．6 emu/cm3,교완장Hc 위1360 Oe．이상측시결과표명,철전유서화자유서가이존재우개태광-첨정석결구당중,통과다층복합화합괄퇴화방식가이증강기철전화개전성능．
The Pb ( Mg1/3 Nb2/3 ) O3 -PbTiO3/CoFe2 O4 and Pb ( Mg1/3 Nb2/3 ) O3 -PbTiO3/CoFe2 O4/Pb ( Mg1/3 Nb2/3 ) O3 -PbTiO3 films were prepared on LaNiO3/SiO2/Si substrates by radio frequency magnetron sputtering. The crystal structure, electrical and magnetic properties were researched in three annealing conditions. Though the two-step annealing, the pure perovskite phase and spinel structure were observed in the two composite films. It is demonstrated that both kinds of composite films have good ferroelectric performance. And the three layered films have better ferroelectric properties with the remanent polarization to 14. 9 μC/cm2 , which may be due to the internal stress/strain effect and interface coupling effect in multilayered composite films. The Leakage current density is only 10 -5 A/cm2 in electric field intensity of 80 kV/cm, which meet the Schottky conductive mechanism in high electric intensity. It is indicated by frequency performance test that:the frequency character-istics of composite film are poorer, and the dielectric properties of double layered composite films are better than those of the three-layered composite films. Meanwhile, the dielectric constantεr is 1078, the dielectric loss tgδis larger, about 0. 43. In addition, the composite films electric hysteresis loop test showed that magnetic proper-ties exist in the both composite films, and the magnetic performance of double layer composite films is larger, in which its saturation magnetization Ms residual magnetization Mr and coercivity Hc can reach 119 emu/cm3 , 31. 6 emu/cm3 and 1360 Oe, respectively. The above test results show that the ferroelectric order and magnetic order can exist in perovskite-spinel structure, the ferroelectric and dielectric properties can be enhanced by the way of multilayer composite and appropriate annealing method.