CAJ | 학술논문

室温下,采用射频磁控溅射AZO粉末靶和Ag靶在玻璃基底上制备Ag层厚度分别为12 nm和15 nm两组对称结构掺铝氧化锌/银/掺铝氧化锌（ AZO/Ag/AZO）透明导电薄膜,研究了Ag层和AZO层厚度对薄膜光电性能的影响。结果表明：3层薄膜的可见光区平均透光率达到了80%,550 nm处的最高透过率达到了88%,方块电阻小于5Ω/□。 Ag层厚度是影响AZO/Ag/AZO薄膜光电性能的主要因素,AZO层的厚度对薄膜光学性能影响较大。
실온하,채용사빈자공천사AZO분말파화Ag파재파리기저상제비Ag층후도분별위12 nm화15 nm량조대칭결구참려양화자/은/참려양화자（ AZO/Ag/AZO）투명도전박막,연구료Ag층화AZO층후도대박막광전성능적영향。결과표명：3층박막적가견광구평균투광솔체도료80%,550 nm처적최고투과솔체도료88%,방괴전조소우5Ω/□。 Ag층후도시영향AZO/Ag/AZO박막광전성능적주요인소,AZO층적후도대박막광학성능영향교대。
The sandwich films composed of aluminum doped zinc oxide ( AZO)/silver ( Ag)/alumi-num doped zinc oxide ( AZO) layers were prepared on glass substrates by RF magnetron sputtering using AZO powder target and solid Ag target at room temperature. Two groups of AZO/Ag/AZO films were deposited with Ag thickness of 12 nm and 15 nm. The optical and electrical properties of the sandwich films were investigated. The results show that the average transmittance of the films are about 80% within the visible wavelength, and the highest transmittance is 88% at 550 nm. The sheet resistances of the multilayer films are lower than 5 Ω/□. The thickness of Ag layer is the main factor to affect the optical and electrical properties of AZO/Ag/AZO films. The thickness of AZO layer has a certain effect on the optical properties of the sandwich films.