CAJ | 학술논문

针对现有微纳米CMM机（Micro－Nano Coordinate Measuring Machine ，微纳米CMM）测量逼近效率低的问题，设计了一种基于视觉引导的3D纳米测头。该测头以石英音叉结合一体式光纤微测杆测球作为微力触发定位传感器，以3个空间布置的微型USB高倍摄像机对工作台做视觉引导。将测球置于3个摄像机焦平面后约100μm处，通过高斯滤波、清晰度评价、极点搜索，对图像进行实时处理，判断试样是否接近测球，实现三维工作台的高低速引导控制。实验结果表明：该测头可以实现大行程、高精度微纳米CMM的自动高速逼近、低速触发定位测量，通用性好、集成度高，测量效率高。
침대현유미납미CMM궤（Micro－Nano Coordinate Measuring Machine ，미납미CMM）측량핍근효솔저적문제，설계료일충기우시각인도적3D납미측두。해측두이석영음차결합일체식광섬미측간측구작위미력촉발정위전감기，이3개공간포치적미형USB고배섭상궤대공작태주시각인도。장측구치우3개섭상궤초평면후약100μm처，통과고사려파、청석도평개、겁점수색，대도상진행실시처리，판단시양시부접근측구，실현삼유공작태적고저속인도공제。실험결과표명：해측두가이실현대행정、고정도미납미CMM적자동고속핍근、저속촉발정위측량，통용성호、집성도고，측량효솔고。
In view of the low measuring approaching efficiency of existing micro /nano CMM, a 3D nano probe based on visual guiding was developed .A quartz tuning fork combined with the integrated fiber micro-stylus and micro-ball tip was used as the mi-cro-force sensor.Three mini USB high-definition cameras were used to guide the 3D worktable to approach the probe which was put behind the focal plane of the three cameras in a distance of 100μm.To determine whether the sample is close enough to the probe and realize the speed control of 3D worktable, the real-time image processing methods have been used , such as Gaussian filter, clarity evaluation , peak search etc .The experimental results show that this probe can achieve automatic high-speed approaching , low-speed triggering and positioning in long stroke with ultra precision .Good generality , high integration and high measuring effi-ciency are all advantages of this probe .