电子学报
電子學報
전자학보
Acta Electronica Sinica
2015年
11期
2322-2330
,共9页
硅基液晶器件%封装工艺%光学检测%液晶灌注%取向层处理
硅基液晶器件%封裝工藝%光學檢測%液晶灌註%取嚮層處理
규기액정기건%봉장공예%광학검측%액정관주%취향층처리
liquid crystal on silicon%assembly technique%optical inspection%liquid crystal filling%alignment layer deposition
本文讨论了纯相位硅基液晶器件（liquid crystal on silicon device，LCOS）的芯片级封装技术。包括具体基础工艺介绍、关键工艺分析及封装检测、质量控制方法等。其中详细介绍了工艺步骤中的玻璃基板和硅基板的光学预先检测、基板清洗、取向层处理、胶水涂覆、组装封装及灌注液晶工艺。同时在密封胶水涂覆、灌注液晶及如何控制器件厚度的原则问题上做出了重点阐述，最后定义了优质封装质量的纯相位硅基液晶器件应该具备的基本要素。
本文討論瞭純相位硅基液晶器件（liquid crystal on silicon device，LCOS）的芯片級封裝技術。包括具體基礎工藝介紹、關鍵工藝分析及封裝檢測、質量控製方法等。其中詳細介紹瞭工藝步驟中的玻璃基闆和硅基闆的光學預先檢測、基闆清洗、取嚮層處理、膠水塗覆、組裝封裝及灌註液晶工藝。同時在密封膠水塗覆、灌註液晶及如何控製器件厚度的原則問題上做齣瞭重點闡述，最後定義瞭優質封裝質量的純相位硅基液晶器件應該具備的基本要素。
본문토론료순상위규기액정기건（liquid crystal on silicon device，LCOS）적심편급봉장기술。포괄구체기출공예개소、관건공예분석급봉장검측、질량공제방법등。기중상세개소료공예보취중적파리기판화규기판적광학예선검측、기판청세、취향층처리、효수도복、조장봉장급관주액정공예。동시재밀봉효수도복、관주액정급여하공제기건후도적원칙문제상주출료중점천술，최후정의료우질봉장질량적순상위규기액정기건응해구비적기본요소。
This paper describes fundamentals of die-level assembly techniques for phase-only liquid crystal on silicon (LCOS)devices,which have not been in-depth discussed previously.The discussion contains the introduction to the basic assembly process,analysis to key assembly procedures,inspection to the assembled device and overall quality control including pre-assembly inspection and cleaning process for both glass and silicon backplane,alignment layer deposition with baking process,glue line pro-cessing,assembly and liquid crystal filling process.In particular,glue line writing,liquid crystal filling and overall quality assessment of assembly process have been substantially investigated.Finally,the excellent quality of assembled phase-only LCOS devices with characteristics have been defined.
