仪表技术与传感器
儀錶技術與傳感器
의표기술여전감기
Instrument Technique and Sensor
2015年
11期
30-33
,共4页
扭摆式硅微加速度计%神经网络%温度补偿%标度因数%零偏稳定性
扭襬式硅微加速度計%神經網絡%溫度補償%標度因數%零偏穩定性
뉴파식규미가속도계%신경망락%온도보상%표도인수%령편은정성
pendulous micro machined silicon accelerometer%neural network%temperature compensation%scale factor%zero bias sta-bility
随着MEMS加速度计应用领域的不断广泛，其温度性能越来越受到重视。在研究扭摆式硅微加速度计结构与温度特性的基础上，采用改进LM＿BP神经网络来构建MEMS加速度计的补偿模型，通过实时温度变化优化出温度补偿模型参数，进而实现实时温度补偿。实验结果表明，通过该方法补偿后的标度因数温度系数和全温零偏稳定性分别由252 ppm／℃和16．62 mg／h减小为100 ppm／℃和2．30 mg／h，证明了该温度补偿方法的有效性和可行性。
隨著MEMS加速度計應用領域的不斷廣汎，其溫度性能越來越受到重視。在研究扭襬式硅微加速度計結構與溫度特性的基礎上，採用改進LM＿BP神經網絡來構建MEMS加速度計的補償模型，通過實時溫度變化優化齣溫度補償模型參數，進而實現實時溫度補償。實驗結果錶明，通過該方法補償後的標度因數溫度繫數和全溫零偏穩定性分彆由252 ppm／℃和16．62 mg／h減小為100 ppm／℃和2．30 mg／h，證明瞭該溫度補償方法的有效性和可行性。
수착MEMS가속도계응용영역적불단엄범，기온도성능월래월수도중시。재연구뉴파식규미가속도계결구여온도특성적기출상，채용개진LM＿BP신경망락래구건MEMS가속도계적보상모형，통과실시온도변화우화출온도보상모형삼수，진이실현실시온도보상。실험결과표명，통과해방법보상후적표도인수온도계수화전온령편은정성분별유252 ppm／℃화16．62 mg／h감소위100 ppm／℃화2．30 mg／h，증명료해온도보상방법적유효성화가행성。
With the application fields of MEMS accelerometer being extended , more and more attention is paid to the tempera-ture performance .The temperature compensation model was established by LM_BP neural network based on analyzing the structure of pendulous micro machined silicon accelerometer and temperature characteristic .Through the realt-ime temperature change , the temperature parameters for the model were optimized and then the real -time temperature compensation was realized .Experimental re-sults show the temperature coefficient of scale factor and the full -temperature zero bias stability were decreased from 252 ppm/℃and 16.62 mg/h to 100 ppm/℃and 2.30 mg/h respectively , proving that the temperature compensation method is correct and feasible .
