CAJ | 학술논문

采用磁过滤阴极真空弧(FCVA)技术,室温下通入C2 H2在Si(100)与304不锈钢片上制备nc-ZrC/a-C：H 复合薄膜.采用 XRD、Raman、XPS、SEM-EDS研究了薄膜的成分及微观结构,利用纳米力学探针和摩擦磨损仪测试薄膜的硬度及摩擦磨损性能.主要讨论了不同C2 H2气体流速对复合膜成分、结构及其性能的影响,研究结果表明：C2 H2气体流速由20 mL·min-1增加到70 mL·min-1时,薄膜中的C原子分数逐渐升高；气体流速超过70 mL·min-1后,C 原子分数趋于平稳(约为75%).随着气体流速的增加,薄膜硬度呈现先增后减的趋势,当气体流速为40 mL·min-1时(C原子分数约为65%),制备的薄膜综合机械性能达到最佳(硬度41.49 GP,摩擦因数0.25).
채용자과려음겁진공호(FCVA)기술,실온하통입C2 H2재Si(100)여304불수강편상제비nc-ZrC/a-C：H 복합박막.채용 XRD、Raman、XPS、SEM-EDS연구료박막적성분급미관결구,이용납미역학탐침화마찰마손의측시박막적경도급마찰마손성능.주요토론료불동C2 H2기체류속대복합막성분、결구급기성능적영향,연구결과표명：C2 H2기체류속유20 mL·min-1증가도70 mL·min-1시,박막중적C원자분수축점승고；기체류속초과70 mL·min-1후,C 원자분수추우평은(약위75%).수착기체류속적증가,박막경도정현선증후감적추세,당기체류속위40 mL·min-1시(C원자분수약위65%),제비적박막종합궤계성능체도최가(경도41.49 GP,마찰인수0.25).
Composite zirconium carbide film with excellent mechanical properties was prepared on silicon and stainless steel substrates by filtered cathode vacuum arc (FCVA)technology with C2 H2 gas as precursor under room temperature.Film composition and microstructure were investigated by grazing incidence X-ray diffraction (GIXRD),X-ray photoelectron spectroscopy (XPS),scanning electron microscope-energy dispersive spectrometer (SEM-EDS)and Raman spectroscopy.Hardness and tribological properties were characterized by high resolution transmission electron microscopy (HR-TEM)and conventional mechanical probes.Effects of C2 H2 flow on composition,microstructure and mechanical properties were studied.It was found that film C content increased with increasing C2 H2 flow rate (20-70 sccm;.But C content reached a constant value of 75%when C2 H2 flow rate was> 60 sccm.Film hardness first increased then decreased with increasing C2 H2 flow rate.Nanocomposite films showed the best mechanical quality (hardness 41.49 GPa,friction coefficient 0.25) at a C2 H2 flow rate of 40 sccm (C content was about 65%).